Large-scale vortical structure detection using microphone array in a semiconductor single wafer spin cleaner-Reference-Cited by-同舟云学术

Large-scale vortical structure detection using microphone array in a semiconductor single wafer spin cleaner

Published:2017 Issue:845 Volume:83 Page:16-00441-16-00441
ISSN:2187-9761
Container-title:Transactions of the JSME (in Japanese)
language:en
Short-container-title:

Author:

KOUCHI Toshinori¹,MIYOSHI Yuki¹,NAKANO Yusuke¹,NAGATA Yasunori¹,YANASE Shinichiro¹

Affiliation:

1. Mechanical and System Engineering of Okayama University

Publisher

Japan Society of Mechanical Engineers

Link

https://www.jstage.jst.go.jp/article/transjsme/83/845/83_16-00441/_pdf

Reference9 articles.

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2. Hattori, T., Problems and perspectives in leading-edge semiconductor wafer cleaning technology, Journal of The Surface Finishing Society of Japan, Vol.59, No.8 (2008), pp.526-532 (in Japanese).

3. Kouchi, T., Fukuda, N., Nakano, Y., Shimizu, Y., Nagata, Y. and Yanase, S., Periodical structure of vortices in a semiconductor single wafer spin cleaner, Transactions of the JSME, Vol.81, No.829 (2015), DOI: 10.1299/transjsme.15-00273. (in Japanese)

4. Kouchi, T. and Masuya, G., Quantification of convection velocity and dominant scale of large-scale structures by high-speed schlieren imaging, AIAA 2012-4148 (2012), DOI: 10.2514/6.2012-4148

5. Moisy, F., Doare, O., Pasutto, T., Daube, O. and Rabaud, M., Experimental and numerical study of the shear layer instability between two counter-rotating disk, Journal of Fluid Mechanics, Vol.507 (2004), DOI:10.1017/S002211200 4008833.