Effects caused by degeneration of natural frequency for pneumatic isolated table with two degrees-of-freedom

Author:

AOKI Yui1,WAKUI Shinji1

Affiliation:

1. Tokyo University of Agriculture and Technology

Publisher

Japan Society of Mechanical Engineers

Reference11 articles.

1. Aoki, Y. and Wakui, S., Pressure mode control of pneumatic isolation table with two degrees-of-freedom, 2016 International Conference on Advanced Mechatronic System (2016), pp. 265-270.

2. Geoffrey, L. G., Non-contacting electro-pneumatic servo for vibration isolation, United States Patent 4850261 (1989).

3. Kainuma, M., Aoki, J., Tamaoki, K., Fujita, T., Chinda, H. and Hayashi, A., Flexible airtight member and vibration resistant device using the same, Japanese patent disclosure 2003-194219 (2003).

4. Kato, T., Shinagawa, D., Tadano, K., Kawashima, K. and Kagawa, T., Active control of vertical vibration of pneumatic air spring for rail train using acceleration, velocity and flow rate feedbacks, Vol. 9, No.13 (2010), pp. 91-97 (in Japanese).

5. Takahashi, M. and Wakui, S., Improvement of isolated table using auxiliary tank, Journal of the Japan Society for Precision Engineering Vol. 75, No. 4 (2009), pp. 542-547 (in Japanese).

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