Author:
SAWADA Tadashi,MORIKAWA Hirohisa
Publisher
Japan Society of Mechanical Engineers
Cited by
4 articles.
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1. Flow modelling of a Holweck pump stage in the viscous regime;Vacuum;2001-01
2. Measurement of axial pressure distribution on a rotor of a helical grooved molecular drag pump;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2000-07
3. Pumping mechanism of helical grooved molecular drag pumps;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1999-07
4. New concepts in turbomolecular pump design;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1993-07