Measurement of axial pressure distribution on a rotor of a helical grooved molecular drag pump-Reference-Cited by-同舟云学术

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Measurement of axial pressure distribution on a rotor of a helical grooved molecular drag pump

Published:2000-07 Issue:4 Volume:18 Page:1772-1776
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Sawada T.,Sugiyama W.,Takano K.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.582422

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modeling of the slip flow in the spiral grooves of a molecular pump;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2001

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