Measurement of contact potential difference and material distribution by using an SEFM
Author:
Affiliation:
1. Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University
Publisher
Japan Society of Mechanical Engineers
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/jamdsm/8/4/8_2014jamdsm0050/_pdf
Reference14 articles.
1. Ando, T., Uchihashi, T. and Kodera, N., High-speed atomic force microscopy, Japanese journal of applied physics, Vol. 51 (2012), 08KA02.
2. Barth, C., et al., Recent trends in surface characterization and chemistry with high-resolution scanning force methods, Advanced materials, Vol. 23(4) (2011), pp.477-501.
3. Belaidi, S., Girard, P. and Leveque, G., Electrostatic forces acting on the tip in atomic force microscopy: Modelization and comparison with analytic expressions, Journal of applied physics, Vol. 81/3 (1997), pp.1023-1030.
4. Gao, W., et al, A noncontact scanning electrostatic force microscope for surface profile measurement, CIRP annals manufacturing technology, Vol. 61, Issue 1 (2012), pp.471-474.
5. Goto, S., Hosobuchi K. and Gao, W., An ultra-precision scanning tunneling microscope Z-scanner for surface profile measurement of large amplitude micro-structures, Measurement science and technology, Vol. 22 (2011), 085101.
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