1. (1) Shinno, H., Yoshioka, H. and Taniguchi, K., A newly developed linear motor-driven aerostatic X-Y planar motion table system for nano-machining, Annals of the CIRP, Vol. 56, No. 1 (2007), pp. 369-372.
2. X-Y-θ Nano-Positioning Table System for a Mother Machine
3. (3) Ohtsuka, M., Furukawa, M. and Higomura, M., The vertical traverse stage in vacuum condition, JSME International Journal, Series III, Vol. 33, No. 1 (1990), pp. 61-64.
4. (4) Beckert, E., Hoffmann, A., and Saffert, E., Development of a vertical wafer stage for high-vacuum applications, Microelectronic Engineering, Vol. 57-58 (2001), pp. 207-212.
5. A precise vertical X-Y stage with weight compensating mechanism. Friction effects on positioning characteristics.