A precise vertical X-Y stage with weight compensating mechanism. Friction effects on positioning characteristics.
Author:
Publisher
Japan Society for Precision Engineering
Subject
Mechanical Engineering
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A newly developed zero-gravity vertical motion mechanism for precision machining;CIRP Annals;2017
2. A Low-Profile Planar Motion Table System Driven by Steel Belt;International Journal of Automation Technology;2015-11-05
3. A Newly Developed Long-Stroke Vertical Nano-Motion Platform with Gravity Compensator;Journal of Advanced Mechanical Design, Systems, and Manufacturing;2008
4. Design of H∞ controller for precise positioning and comparison with PID control;Transactions of the Institute of Measurement and Control;1996-10
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