Thermal roll-to-roll nanoimprinting using a replica mold without release agent-Reference-Cited by-同舟云学术

Thermal roll-to-roll nanoimprinting using a replica mold without release agent

Published:2018 Issue:5 Volume:12 Page:JAMDSM0101-JAMDSM0101
ISSN:1881-3054
Container-title:Journal of Advanced Mechanical Design, Systems, and Manufacturing
language:en
Short-container-title:JAMDSM

Author:

UNNO Noriyuki¹,KAKIMOTO Shohei²,MÄKELÄ Tapio³,HIWASA Shin⁴,TANIGUCHI Jun²

Affiliation:

1. Department of Mechanical Engineering, Tokyo University of Science

2. Department of Applied Electronics, Tokyo University of Science

3. VTT Printed and Hybrid Functionalities

4. AUTEX,INC

Publisher

Japan Society of Mechanical Engineers

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/jamdsm/12/5/12_2018jamdsm0101/_pdf

Reference13 articles.

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2. Guo, L. J., Recent progress in nanoimprint technology and its applications, Journal of Physics D: Applied Physics., 37, 11 (2004) R123.

3. Haisma, J., Verheijen, M., Van Den Heuvel, K., Van Den Berg, J., Mold-assisted nanolithography: A process for reliable pattern replication, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 14, 6 (1996) pp. 4124-4128.

4. Landis, S., Chaix, N., Gourgon, C., Perret, C., Leveder, T., Stamp design effect on 100 nm feature size for 8 inch NanoImprint lithography, Nanotechnology, 17, 10 (2006) 2701.

5. Mäkelä, T., Haatainen, T., Ahopelto, J., Roll-to-roll printed gratings in cellulose acetate web using novel nanoimprinting device, Microelectronic Engineering, 88, 8, (2011) pp.2045-2047.

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