Ultraprecision cutting of single-crystal calcium fluoride for fabricating micro flow cells

Author:

KOMIYA Ryo1,KIMURA Tetsunari23,NOMURA Takashi2,KUBO Minoru24,YAN Jiwang1

Affiliation:

1. Department of Mechanical Engineering, Faculty of Science and Technology, Keio University

2. RIKEN, SPring-8 Center

3. Department of Chemistry, Graduate School of Science, Kobe University

4. JST PRESTO

Publisher

Japan Society of Mechanical Engineers

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference14 articles.

1. Azami S., Kudo H., Mizumoto Y., Tanabe T., Yan J., Kakinuma Y., Experimental study of crystal anisotropy based on ultra-precision cylindrical turning of single-crystal calcium fluoride, Prec. Eng., Vol. 40, (2015), pp. 172-181.

2. Kubo M., Nakashima S., Yamaguchi S., Ogura T., Mochizuki M., Kang J., Tateno M., Shinzawa-Itoh K., Kato K., and Yoshikawa S., Effective pumping-proton collection facilitated by a copper site (CuB) of bovine heart cytochrome c oxidase, revealed by a newly developed time-resolved infrared system, J. Biol. Chem., Vol. 288, (2013), pp. 30259-30269.

3. Leung T. P., Lee W. B. and Lu X. M., Diamond turning of silicon substrates in ductile-regime, J. Mater. Proc. Tech., Vol. 73, (1998), pp. 42-48.

4. O’Connor B. P., M. Eric and Couey J. A., On the effect of crystallographic orientation on ductile material removal in silicon, Prec. Eng., Vol. 29, (2005), pp. 124-132.

5. Retherford R. S., Sabia R. and Sokira V. P., Effect of surface quality on transmission performance for (111) CaF2, Appl. Surf. Sci., Vol. 183, (2001), pp. 264-269.

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