Ductile Machining Mechanism for Micro-structure by Ultra-Precision Raster Milling
Author:
Publisher
Springer Nature Singapore
Link
https://link.springer.com/content/pdf/10.1007/978-981-13-3261-6_12-2
Reference28 articles.
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3. Chen Y-L, Cai Y, Shimizu Y, Ito S, Gao W, Ju B-F (2015) Ductile cutting of silicon microstructures with surface inclination measurement and compensation by using a force sensor integrated single point diamond tool. J Micromech Microeng 26:025002
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5. Goel S, Luo X, Agrawal A, Reuben RL (2015) Diamond machining of silicon: a review of advances in molecular dynamics simulation. Int J Mach Tools Manuf 88:131–164
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