Affiliation:
1. LIMMS/CNRS-IIS and CIRMM, University of Tokyo
Publisher
Japan Society of Mechanical Engineers
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference13 articles.
1. Special issue on point of contact between bio-technology and precision engineering. Physiological organ and control engineering.
2. Micro ultrasonic machining and its applications in MEMS
3. Etching processes for High Aspect Ratio Micro Systems Technology (HARMST)
4. Deep reactive ion etching of Pyrex glass using SF6 plasma
5. (5) Cross, T., Liew, L-A., Bright, V.M., Dunn, M.L., Daliy, J.W. and Raj, R., Fabrication Process of Ultra High Aspect Ratio Polysilazane-derived MEMS, IEEE Proc. MEMS, (2002), pp.172-175.
Cited by
13 articles.
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