Micro ultrasonic machining and its applications in MEMS-Reference-Cited by-同舟云学术

Micro ultrasonic machining and its applications in MEMS

Published:1996-11 Issue:2 Volume:57 Page:159-164
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sun Xi-Qing,Masuzawa T.,Fujino M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Micro ultrasonic machining and self-aligned multilayer machining/assembly technologies for 3D micromachines;Sun,1996

2. Micro electro-discharge machining and its applications;Masaki,1990

3. Versatile performance of ultrasonic machining;Moreland;Ceram. Bull.,1988

4. Non-traditional technologies for micro-fabrication;Dario;J. Micromech. Microeng.,1995

5. Self-aligned machining and assembly of high aspect ratio microparts into silicon;Langen,1995

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