Glass Surface Modification Was Induced by the Combination of Coating Technology and Femtosecond Laser Assisted Chemical Etching

Abstract

Due to its high hardness and high transmittance, ultra-white glass has a strong application prospect in the fields of optoelectronics industry and experimental instruments. However, because of its brittleness, it was still a difficult problem in the machining industry. Surface modification provides a basic research idea for ultra-white glass microstructure processing. An effective method to obtain surface modified area on ultra-white glass was presented. The modified zone on the surface of ultra-white glass was induced by the technique of coating and femtosecond laser-assisted chemical etching. The method combines vacuum coating with femtosecond laser irradiation. Next, the modified glass was processed with highly selective potassium hydroxide solution. In order to control the surface size more efficiently, the optimization experiment of laser parameters and chemical parameters on the machining process was carried out. The experimental results show that the method made the surface modification of ultra-white glass more easily and provides basic research for fabricating microchannels on the material.