Nanoelectromechanical Sensors Based on Suspended 2D Materials-Reference-Cited by-同舟云学术

Nanoelectromechanical Sensors Based on Suspended 2D Materials

Published:2020-07-20 Issue: Volume:2020 Page:1-25
ISSN:2639-5274
Container-title:Research
language:en
Short-container-title:Research

Author:

Lemme Max C.¹²^ORCID,Wagner Stefan²^ORCID,Lee Kangho³^ORCID,Fan Xuge⁴^ORCID,Verbiest Gerard J.⁵^ORCID,Wittmann Sebastian⁶^ORCID,Lukas Sebastian¹^ORCID,Dolleman Robin J.⁷^ORCID,Niklaus Frank⁴^ORCID,van der Zant Herre S. J.⁸^ORCID,Duesberg Georg S.³^ORCID,Steeneken Peter G.⁵⁸^ORCID

Affiliation:

1. Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany

2. AMO GmbH, Advanced Microelectronic Center Aachen (AMICA), Otto-Blumenthal-Str. 25, 52074 Aachen, Germany

3. Institute of Physics, Faculty of Electrical Engineering and Information Technology, Universität der Bundeswehr München, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany

4. Division of Micro and Nanosystems, KTH Royal Institute of Technology, Malvinas Väg 10, 10044 Stockholm, Sweden

5. Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, Netherlands

6. Infineon Technologies AG, Wernerwerkstraße 2, 93049 Regensburg, Germany

7. 2nd Institute of Physics, RWTH Aachen University, Otto-Blumenthal-Str., 52074 Aachen, Germany

8. Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, Netherlands

Abstract

The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

Funder

Deutsche Forschungsgemeinschaft

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

Link

http://downloads.spj.sciencemag.org/research/2020/8748602.pdf

Reference247 articles.

1. Detection of individual gas molecules adsorbed on graphene

2. Graphene Sensors

3. High Quality Factor Mechanical Resonators Based on WSe2 Monolayers