Influence of Fluoride Ions Contamination in Front Opening Unified Pod (FOUP) Generating Defective Bonding Pad-Reference-Cited by-同舟云学术

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Influence of Fluoride Ions Contamination in Front Opening Unified Pod (FOUP) Generating Defective Bonding Pad

Published:2017 Issue:3 Volume:17 Page:936-941
ISSN:1680-8584
Container-title:Aerosol and Air Quality Research
language:
Short-container-title:Aerosol Air Qual. Res.

Author:

Kwon Soon Seok,Hwang Sung Min,Kim Hyoung Ryeun,Jang Hee Chang,Hong Jeong Hoon,Song Gil Joo,Park Hyun Yul,Kim Minsoo,Shin Youhwan,Kim Jin Young,Noh Tae Yong,Yoo Seoung-Kyo

Publisher

Taiwan Association for Aerosol Research

Subject

Pollution,Environmental Chemistry

Link

http://www.aaqr.org/article/download?articleId=1475&path=/files/article/1466/26_AAQR-16-10-TN-0457_936-941.pdf

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Selective Removal of Various Resilient Ionic and Halides-Based Surface Contaminants by Wet Cleaning;Solid State Phenomena;2023-08-14

2. A Novel Method To Eliminate Bond Pad Crystal;2023 China Semiconductor Technology International Conference (CSTIC);2023-06-26

3. Reduction of Aluminum Fluoride Formation during Fluorinated Plasma Etching of Dielectric Passivation Layer over Aluminum Pad;2022 IEEE 24th Electronics Packaging Technology Conference (EPTC);2022-12-07

4. Review—Airborne Molecular Contamination: Recent Developments in the Understanding and Minimization for Advanced Semiconductor Device Manufacturing;ECS Journal of Solid State Science and Technology;2020-07-03

5. Humidity Control for Front Opening Unified Pod after Opening Its Door in a Mini-Environment;Applied Sciences;2018-07-15

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