A Study of Heat Transfer and Particle Motion Relative to the Modified Chemical Vapor Deposition Process

Author:

Choi M.1,Greif R.1,Baum H. R.2

Affiliation:

1. Department of Mechanical Engineering, University of California at Berkeley, Berkeley, CA 94720

2. Center for Fire Research, National Institute of Standards and Technology, Gaithersburg, MD 20899

Abstract

Heat transfer and particle motion relative to the modified chemical vapor deposition process have been studied for general values of the torch speed. Three-dimensional temperature fields have been obtained over the entire cross section of the tube and the effects of tube rotation and localized torch heating in the axial and circumferential directions have been studied. The particle trajectories have been calculated from a formulation that includes the contributions from forced flow, i.e, Poiseuille flow in the axial direction, rigid body rotation about the tube axis, and thermophoretic contributions in the axial, radial, and angular directions. The particle trajectories are helices and are shown to be strongly dependent on the tube rotation.

Publisher

ASME International

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

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