1. State Key Laboratory of Ultra-Precision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon 999077, Hong Kong;
2. School of Mechanical Engineering and Automation, Harbin Institute of Technology, Shenzhen 518055, China e-mail:
3. State Key Laboratory of Ultra-precision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon 999077, Hong Kong e-mail:
4. State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, China;