1. Department of Micro Engineering, Kyoto University, Katsura, Nishigyo-ku, Kyoto 615-8530, Japan e-mail:
2. Department of Micro Engineering, Kyoto University Katsura, Nishigyo-ku, Kyoto 615-8530, Japan
3. DMG Mori Seiki, Co., Ltd., Meieki 2-35-16, Nakamura-ku, Nagoya 450-0002, Japan