1. Department of Mechanical Systems Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Aichi, Japan
2. Mem. ASME Department of Mechanical Systems Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Aichi, Japan e-mail:
3. Ebara Corporation, 4-2-1 Honfujisawa, Fujisawa-shi 251-8502, Kanagawa, Japan e-mail: