Hydrodynamic Performance of Gas Microbearings

Author:

Kim Daejong1,Lee Sanghoon1,Bryant Michael D.1,Ling Frederick F.1

Affiliation:

1. Department of Mechanical Engineering, University of Texas at Austin, Austin, TX 78712

Abstract

Hydrodynamic performance of gas microbearings, fabricated with deep X-ray lithography and electroplating, will be presented in this article. Static performance in terms of load parameters and attitude angles was calculated using Molecular Gas Lubrication (MGL) theory. Threshold speed and allowable rotor mass were calculated to investigate safe operating conditions of the fabricated gas microbearings using orbit simulation. Finally, improved bearing designs were proposed to increase stability.

Publisher

ASME International

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials

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