Design and Analysis of a Surface Micromachined Spiral-Channel Viscous Pump-Reference-Cited by-同舟云学术

Design and Analysis of a Surface Micromachined Spiral-Channel Viscous Pump

Published:2003-03-01 Issue:2 Volume:125 Page:339-344
ISSN:0098-2202
Container-title:Journal of Fluids Engineering
language:en
Short-container-title:

Author:

Kilani Mohammad I.¹,Galambos Paul C.²,Haik Yousef S.¹,Chen Ching-Jen¹

Affiliation:

1. Mechanical Engineering Department, Florida State University, Tallahassee, FL 32310

2. Intelligent Micromachine Department, Sandia National Laboratories, Albuquerque, NM 87185

Abstract

A new viscous spiral micropump which uses the surface micromachining technology is introduced. The paper outlines the design of a spiral pump fabricated in five levels of polysilicon using Sandia’s Ultraplanar Multilevel MEMS Technology (SUMMiT), and presents an analytical solution of the flow field in its spiral channel. The pump characteristics are obtained experimentally for a scaled-up prototype and are found to be in good agreement with the results obtained using the analytical model.

Publisher

ASME International

Subject

Mechanical Engineering

Link

http://asmedigitalcollection.asme.org/fluidsengineering/article-pdf/125/2/339/5902733/339_1.pdf

Reference7 articles.

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2. Sharachandra, M. C., Sen, M., and Gad-Elhak, M., 1997, “Navier-Stokes Simulations of a Novel Viscous Pump,” ASME J. Fluids Eng., 119, pp. 372–382.

3. Day, R., and Stone, H., 2000, “Lubrication Analysis and Boundary Integral Simulations of a Viscous Micropump,” J. Fluid Mech., 416, pp. 197–216.

4. Garcia, E., and Sniegowski, J., 1995, “Surface Micromachined Microengines,” Sens. Actuators, 48, pp. 203–214.

5. Dean, W. R. , 1927, “Note on the Motion of Fluid in a Curved Pipe,” Philos. Mag., 4, pp. 208–219.

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