Surface micromachined microengine

Author:

Garcia Ernest J.,Sniegowski Jeffry J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. IC-processed electrostatic micromotors;Fan;Sensors and Actuators,1989

2. IC-processed electrostatic synchronous micromotors;Tai;Sensors and Actuators,1989

3. M. Mehregany, P. Nagarkar, S.D. Senturia and J.H. Lang, Operation of microfabricated harmonic and ordinary side-drive motors, Proc. Micro Electro Mechanical Syst., Napa Valley, CA, USA, Feb. 1990, pp. 1–8

4. Laterally driven polysilicon resonant microstructures;Tang;Sensors and Actuators,1989

5. E.J. Garcia and J.J. Sniegowski, The design and modelling of a comb-drive-based microengine for mechanism drive applications, Proc. 7th Int. Conf. Solid-State Sensors and and Actuators (Transducers '93), Yokohama, Japan, 7–10 June, 1993, pp. 763–766

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