Feature Model for Surface Micro-Machined MEMS

Abstract

Lacking proper geometric design capability is one of the main factors that are impeding MEMS development. MEMS developers are suffering the cumbersome and unintuitive traditional design methodology in which the design of a new product begins with figuring out its fabrication mask layouts. As the kernel of new MEMS design methodology, a new model for MEMS devices is highly required to implement structured design strategies. This paper focuses on developing a feature model for MEMS geometric design, which enables designers to create fabrication-ready 3D models of MEMS devices in an intuitive manner. This feature model not only represents the geometric information of the devices but also provides the high level engineering means to describe the design intent, and hence, it can be used to facilitate the decision making process in design and the modification of models in subsequent stages. The separation of design and fabrication allows designers to concentrate on creative design activity without thinking of the tedious fabrication issues. The features specified according to common fabrication process aim to systematically map design intents to fabrication data. A generalized framework for MEMS feature model is presented in which the features are manipulated and managed in a declarative manner.