Graph-Based Manufacturing Flow Generating Method for Micro Device

Abstract

This paper concentrates on how to generate manufacturing flow from the feature model of surface micromachined device. Firstly, the feature-based designing framework is presented, in which the manufacturing flow generation method plays an important role for feature mapping. Then, the graph-based approach makes benefit for the logical organizing and real-time adjusting of design features. The features combination approach is further presented to obtain layered model, which in turn corresponds to an optional manufacturing flow. In the meantime, some optimal operations are performed for better manufacturability. Finally, a polysilicon micro motor is used to illustrate the approach. In addition, the results are discussed to indicate the future work on scheme evaluation.