Control of Ablation Depth and Surface Structure in P3 Scribing of Thin-Film Solar Cells by a Picosecond Laser
Author:
Affiliation:
1. Center for Laser-Based Manufacturing, Purdue University, West Lafayette, IN 47907;
2. School of Mechanical Engineering, Purdue University, West Lafayette, IN 47907
3. School of Industrial Engineering, Purdue University, West Lafayette, IN 47907
Abstract
Publisher
ASME International
Subject
Industrial and Manufacturing Engineering,Process Chemistry and Technology,Mechanics of Materials
Link
http://asmedigitalcollection.asme.org/micronanomanufacturing/article-pdf/doi/10.1115/1.4027733/6063444/jmnm_002_03_031007.pdf
Reference40 articles.
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2. Micromachining of Metals, Alloys, and Ceramics by Picosecond Laser Ablation;ASME, J. Manuf. Sci. Eng.,2010
3. Comparative Investigation of Solar Cell Thin Film Processing Using Nanosecond and Femtosecond Lasers;J. Phys. D: Appl. Phys.,2006
4. Selective Ablation of Thin Films With Short and Ultrashort Laser Pulses;Appl. Surf. Sci.,2006
5. Selective Ablation of Thin Mo and TCO Films With Femtosecond Laser Pulses for Structuring Thin Film Solar Cells;Appl. Phys. A,2007
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