Inline Plasma Analysis as Tool for Process Monitoring in Laser Micro Machining for Multi-layer Materials
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference21 articles.
1. Femtosecond, picosecond and nanosecond laser ablation of solids;Chichkov;Applied Physics A,1996
2. Booth, H., 2006. Techniques and Applications of Laser Micro-Processing at the Micron and Sub-Micron Level. Conf. on Lasers and Electro-Optics.
3. Zhao, X., Cao, Y., Nian, Q., Cheng, G., Shin, Y.C., 2014. Control of Ablation Depth and Surface Structure in P3 Scribing of Thin-Film Solar Cells by a Picosecond Laser. J. Micro Nano-Manufacturing 2(3).
4. Dligatch, S., Netterfield, R.P., 2004. Real time process control and monitoring in multi-layer filter deposition. Optical Interference Coatings, OSA Technical Digest Series.
5. A critical assessment of laser ablation ICP-MS as an analytical tool for depth analysis in silica-based glass samples;Mank;Journal of analytical atomic spectrometry,1999
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