Shape Memory Alloy Bimorph Microactuators by Lift-Off Process-Reference-Cited by-同舟云学术

Shape Memory Alloy Bimorph Microactuators by Lift-Off Process

Published:2020-09-01 Issue:3 Volume:8 Page:
ISSN:2166-0468
Container-title:Journal of Micro and Nano-Manufacturing
language:en
Short-container-title:

Author:

Sun Hao¹,Luo Jianjun²,Ren Zhongjing³,Lu Ming⁴,Nykypanchuk Dmytro⁴,Mangla Sundeep⁵,Shi Yong³

Affiliation:

1. School of Astronautics, Northwestern Polytechnical University, 127 Youyi Road, Xi'an, Shaanxi 710072, China; Department of Mechanical Engineering, Stevens Institute of Technology, 1 Castle Point Terrace, Hoboken, NJ 07030

2. School of Astronautics, Northwestern Polytechnical University, 127 Youyi Road, Xi'an, Shaanxi 710072, China

3. Department of Mechanical Engineering, Stevens Institute of Technology, 1 Castle Point Terrace, Hoboken, NJ 07030

4. Center for Functional Nanomaterials, Brookhaven National Laboratory, 98 Rochester Street, Upton, NY 11973

5. Downstate Medical Center, State University of New York, 450 Clarkson Avenue, P.O. Box 1189, Brooklyn, NY 11203-2098

Abstract

Abstract This study aims to develop a new fabrication process to create high-precision patterned shape memory alloy (SMA) bimorph micro-actuators by the e-beam evaporation technique. To examine the effect of the annealing process on nitinol (NiTi) thin film characteristics, the as-deposited and annealed NiTi thin films are, respectively, investigated. X-ray diffraction (XRD) results demonstrate the crystallization of NiTi thin films after annealing at 600 °C. The transformation behaviors of NiTi thin films during heating and cooling are studied using the differential scanning calorimeter (DSC). Furthermore, scanning electron microscopy (SEM) images indicate that SMA bimorph micro-actuators with high-precision features can be fabricated by the lift-off process, without any wet or dry etching procedures, and their thermomechanical behaviors are experimentally verified by comparing them with that of finite element analysis simulation results.

Funder

China Scholarship Council

U.S. Department of Energy, Office of Science, Basic Energy Sciences

Publisher

ASME International

Subject

Industrial and Manufacturing Engineering,Process Chemistry and Technology,Mechanics of Materials

Link

http://asmedigitalcollection.asme.org/micronanomanufacturing/article-pdf/8/3/031003/6564858/jmnm_008_03_031003.pdf

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