Study of the Freezing Chuck for Non-Traditional Clamping Applications

Abstract

A freezing chuck with thermoelectric coolers and coolant channels is investigated. Measurement for freezing/thawing processes and analysis of heat transfer enhancements are conducted. Three channel configurations are designed and investigated by numerical simulations and experimental measurements, respectively, to compare the temperature distributions and heat transfer enhancements. Regarding to experiments, inlet temperatures and flow rates of coolants are altered, and transient and steady surface temperatures on the top-plate are measured for these three channel designs. In numerical analysis, convective fluid flows and heat transfers are solved to find temperature, velocity, and pressure fields inside the channel and surface temperatures of top-plate of the freezing chuck by a software package. Comparisons between experimental measurements and numerical simulations are made. Effects of flow rates, inlet coolant temperatures, and channel designs, upon the steady and transient state of temperature distributions and heat transfer enhancements are discussed and conclusions are addressed.