Stability and Resolution Analysis of a Phase-Locked Loop Natural Frequency Tracking System for MEMS Fatigue Testing-Reference-Cited by-同舟云学术

Stability and Resolution Analysis of a Phase-Locked Loop Natural Frequency Tracking System for MEMS Fatigue Testing

Published:2002-12-01 Issue:4 Volume:124 Page:599-605
ISSN:0022-0434
Container-title:Journal of Dynamic Systems, Measurement, and Control
language:en
Short-container-title:

Author:

Sun X.¹,Horowitz R.¹,Komvopoulos K.¹

Affiliation:

1. Department of Mechanical Engineering, University of California, Berkeley, CA 94720

Abstract

An analysis of a nonlinear control system that was used to track the natural frequency of a MEMS resonator is presented in this paper. A phase-locked loop system is used to track the natural frequency of the resonator due to fatigue of the spring element. A model for the control system is established and the system behavior is analyzed using an averaging method. The analysis provides a quantitative criterion for selecting the control gain to achieve stability. Simulation results are shown to be in agreement with the theoretical analysis. Tracking accuracy under the presence of Brownian noise and capacitive position sensing noise is also analyzed by using a variance propagation equation for the nonlinear dynamic system utilizing a first-order Taylor series approximation. The theoretically estimated resolution is also found to be in good agreement with simulation results.

Publisher

ASME International

Subject

Computer Science Applications,Mechanical Engineering,Instrumentation,Information Systems,Control and Systems Engineering

Link

http://asmedigitalcollection.asme.org/dynamicsystems/article-pdf/124/4/599/5488296/599_1.pdf

Reference12 articles.

1. Komvopoulos, K., 2001, “Microelectromechanical Structures for Multiaxial Fatigue Testing,” Advances in Fracture Research, Proc. of 10th Int. Congress on Fracture, Elsevier, Honolulu, HI, Paper No. ICF100217OR.

2. Markus, K. W., Koester, D. A., Cowen, A., Mahadevan, R., Dhuler, V. R., Roberson, D., and Smith, L., 1995, “MEMS Infrastructure: The Multi-User MEMS Processes (MUMPs),” Proc. of SPIE: Micromachining and Microfabrication Process Technology, International Society for Optical Engineering, Austin, TX, 2639, pp. 54–63.

3. Connally, J. A., and Brown, S. B., 1993, “Micromechanical Fatigue Testing,” Exp. Mech., 33(2), pp. 81–90.

4. Brown, S. B., Van Arsdell, W., and Muhlstein, C. L., 1997, “Materials Reliability in MEMS Devices,” Proc. of 1997 Int. Conf. on Solid-State Sensors and Actuators, IEEE, June 16–19, 1997, Chicago, IL, pp. 591–593.

5. Dual, J., Mazza, E., Schiltges, G., and Schlums, D., 1997, “Mechanical Properties of Microstructures: Experiments and Theory,” Proc. of SPIE: Microlithography and Metrology in Micromachining III, Int. Society of Optical Engineering, Austin, TX, 3225, pp. 12–22.

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