Flow Visualizations and Transient Temperature Measurements in an Axisymmetric Impinging Jet Rapid Thermal Chemical Vapor Deposition Reactor-Reference-Cited by-同舟云学术

Flow Visualizations and Transient Temperature Measurements in an Axisymmetric Impinging Jet Rapid Thermal Chemical Vapor Deposition Reactor

Published:2002-05-10 Issue:3 Volume:124 Page:564-570
ISSN:0022-1481
Container-title:Journal of Heat Transfer
language:en
Short-container-title:

Author:

Mathews A. G.¹,Peterson J. E.¹

Affiliation:

1. Department of Mechanical Engineering, University of Florida, Gainesville, FL 32611

Abstract

Carrier gas flow in a rapid thermal chemical vapor deposition (RTCVD) reactor was studied using flow visualization and laser induced Rayleigh light scattering (RLS). The flow field consists of a downward axisymmetric jet of carrier gas impinging on a wafer which undergoes transient heating. Flow visualization results showed three stable flow regimes as the surface rose from ambient to high temperature: momentum dominated, buoyancy dominated, and a second momentum dominated regime at high temperature; each separated by unstable, chaotic flows. RLS temperature measurements provided transient gas temperature histories, documenting flow visualization results. Regions of momentum dominated, buoyancy dominated, and unstable flows were defined as a function of Grashof number, Reynolds number, pressure, and wafer temperature.

Publisher

ASME International

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

http://asmedigitalcollection.asme.org/heattransfer/article-pdf/124/3/564/5912420/564_1.pdf

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