A Linear Piezomotor Integrated by a Monolithic Flexural Frame
Author:
Affiliation:
1. Department of Mechanical Engineering, Precision Manufacturing Institute, University of Connecticut, Storrs, CT 06269
Abstract
Publisher
ASME International
Subject
Computer Graphics and Computer-Aided Design,Computer Science Applications,Mechanical Engineering,Mechanics of Materials
Link
http://asmedigitalcollection.asme.org/mechanicaldesign/article-pdf/119/3/414/5722482/414_1.pdf
Reference9 articles.
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2. Gregory S. , and RogersC. T., 1989, “High-speed Scanning Tunneling Microscopes,” J. Vac. Sci. Technol. A, Vol. 6, pp. 390–392.
3. Jeon D. , and WillisR. F., 1991, “Inchworm Controller for Fine Approach in a Scanning Tunneling Microscope,” J. Vac. Sci. Technol. A, Vol. 9, pp. 2418–2419.
4. Joyce G. C. , and WilsonG. C., 1969, “Micro-Step Motor,” J. Sci. Instrum.: J. Phys. E, Vol. 2, pp. 661–663.
5. Kurosawa M. , YamadaH., and UehaS., 1989, “Hybrid Transducer Type Ultrasonic Linear Motor,” J. J. Appl. Phys., Vol. 28, pp. 158–160.
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