A ‘micro-incher’ machine carriage drive with automatic feedback control of step-pitch, step-phase and inter-step positioning-Reference-Cited by-同舟云学术

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A ‘micro-incher’ machine carriage drive with automatic feedback control of step-pitch, step-phase and inter-step positioning

Published:1982-04 Issue:2 Volume:4 Page:85-91
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Gee A.E.

Publisher

Elsevier BV

Subject

General Engineering

Reference47 articles.

1. Diffraction Gratings;Stroke,1967

2. Diffraction Fratings;Palmer;Rep. Prog. Phys.,1975

3. Diffraction Gratings for Spectroscopy;Loewen;J. Phys. E: Sci. Instrum.,1970

4. The Diffraction Grating — An Opinionated Appraisal;Harrison;Appl. Opt.,1973

5. Interferometric Measurement of Wave-Front Abberrations in Gratings and Echelles;Stroke;J. Opt. Soc. Am.,1955

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1. A Linear Piezomotor Integrated by a Monolithic Flexural Frame;Journal of Mechanical Design;1997-09-01

2. Developing a linear piezomotor with nanometer resolution and high stiffness;IEEE/ASME Transactions on Mechatronics;1997-03

3. A Linear Piezomotor of High Stiffness and Nanometer Resolution;CIRP Annals;1997

4. Piezoelectric ceramic actuators: A review of machinery applications;Precision Engineering;1990-07

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