1. Product Innovation Department, Hyogo Prefectural Institute of Technology, 3-1-12 Yukihira-cho, Suma-ku, Kobe, Hyogo 654-0037, Japan
2. Department of Mechanical Engineering, Faculty of Science and Engineering, Ritsumeikan University, 1-1-1 Nojihigashi, Kusatsu-shi, Shiga 525-8577, Japan
3. Advanced Packaging Laboratory, KYOCERA SLC Technologies Corporation, 656 Ichimiyake Yasu-shi, Shiga 520-2362, Japan