Microwear Properties of Silicon Single Crystal and the Wear Structure-Reference-Cited by-同舟云学术

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Microwear Properties of Silicon Single Crystal and the Wear Structure

Published:2003 Issue:6 Volume:67 Page:269-273
ISSN:0021-4876
Container-title:Journal of the Japan Institute of Metals
language:en
Short-container-title:J. Japan Inst. Metals and Materials

Author:

Arima Norikazu¹,Takagi Makoto²,Iwata Hiroyuki³,Imura Toru²,Sasaki Katsuhiro⁴,Saka Hiroyasu⁴

Affiliation:

1. Graduate School, Aichi Institute of Technology

2. Department of Mechanical Engineering, Aichi Institute of Technology

3. Research Institute for Industrial Technology, Aichi Institute of Technology

4. Department of Quantum Engineering, Nagoya University

Publisher

Japan Institute of Metals

Subject

Materials Chemistry,Metals and Alloys,Mechanics of Materials,Condensed Matter Physics

Link

https://www.jstage.jst.go.jp/article/jinstmet1952/67/6/67_6_269/_pdf

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Molecular dynamics study of crystal orientation effect on surface generation mechanism of single-crystal silicon during the nano-grinding process;Journal of Manufacturing Processes;2022-02

2. Effects of Atmosphere and Temperature on Microtribology between Silicon Single Crystals;Journal of the Japan Institute of Metals and Materials;2020-09-01

3. Microtribology between Single Crystals of Silicon;Journal of the Japan Institute of Metals;2015

4. Nanoprocessing on Silicon (100) Surface by Using SPM and the Study of the Structural Change;Journal of the Japan Society for Precision Engineering;2007

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