Substructures of Gas-Ion-Irradiation-Induced Surface Blisters in Silicon Studied by Cross-Sectional Transmission Electron Microscopy
Author:
Affiliation:
1. Department of Materials, Physics and Energy Engineering, Graduate School of Engineering, Nagoya University
Publisher
Japan Institute of Metals
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://www.jstage.jst.go.jp/article/matertrans/46/10/46_10_2117/_pdf
Reference31 articles.
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