In situ Observations of Growing Pits during Tunnel Etching of Aluminum

Author:

Makino E.1,Yajima T.1,Shibata T.1,Ikeda M.1,Tanno Y.2,Suganuma E.2

Affiliation:

1. Department of Precision Engineering, Faculty of Engineering, Hokkaido University

2. Yamagata Research Institute of Technology

Publisher

Japan Institute of Metals

Subject

General Engineering

Reference10 articles.

1. 1) C. G. Dunn and R. B. Bolon: J. Electrochem. Soc., 116 (1969), 1050.

2. 2) C. G. Dunn, R. B. Bolon, A. S. Alwan and A. W. Stirling: J. Electrochem. Soc., 118 (1971), 381.

3. 3) R. S. Alwitt, H. Uchi, T. R. Beck and R. C. Alkire: J. Electrochem. Soc., 131 (1984), 13.

4. 4) K. Herbert and R. Alkire: Proc. Symp. Alum. Surf. Treat. Technol., ed. by R. S. Alwitt and G. E. Thompson, The Electrochemical Society, (1986) p. 320.

5. 5) T. R. Beck, A. J. Babchin and K. J. McGrath: Proc. Symp. Alum. Surf. Treat. Technol., ed. by R. S. Alwitt and G. E. Thompson, The Electrochemical Society, (1986), p. 334.

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