Ion-Plating Deposition of MgO Thin Films
Author:
Affiliation:
1. R&D Center, ShinMaywa Industries, Ltd.
2. Hitachi Research Laboratory, Hitachi, Ltd.
3. Graduate Student, Ibaraki University
Publisher
Japan Institute of Metals
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://www.jstage.jst.go.jp/article/matertrans/42/3/42_3_411/_pdf
Reference6 articles.
1. 1) G. Hass: J. Opt. Soc. Am. 39 (1949) 532–540.
2. 2) E. Ritter: Z. angew. Math. Physik 12 (1961) 275–276.
3. 3) H. Uchiike, K. Miura, N. Nakayama, T. Shinoda and Y. Fukuyama: IEEE Trans. Electron Devices ED-23 (1976) 1211–1217.
4. 4) Japanese patent, No. 1560327.
5. 5) K. Uetani, H. Kajiyama, T. Yamaguchi, K. Nose, K. Onisawa and T. Minemura: Mater. Trans. JIM 41 (2000) 1161–1163.
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