Fabrication of a Dihedral Corner Reflector Array for a Floating Image Manufactured by X-ray Lithography Using Synchrotron Radiation
Author:
Affiliation:
1. Laboratory of Advance Science and Technology for Industry, University of Hyogo
2. Parity Innovations co. ltd.
3. Synchrotoron radiation Research center, Nagoya University
Publisher
Japan Institute of Electronics Packaging
Link
https://www.jstage.jst.go.jp/article/jiepeng/8/1/8_23/_pdf
Reference14 articles.
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4. [4] M. Kawazu and T. Inokuchi, "Imaging Device using a roof micro lens array," Applied Optics, Vol. 24, No. 24, pp. 4300-4306, 1985.
5. [5] R. Volkel, H. Herzig, P. Nussbaum, and R. Dandliker, "Microlens array imaging system for photolithography," Optical Engineering, Vol. 35, No. 11, pp. 3323-3330, 1996.
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