Non-destructive Anomaly Detection Method for Wire Bonding Using a Thin Film AE Sensor

Author:

Koishi Yasutake12,Ishida Shuichi2,Tabaru Tatsuo2,Iwasaki Wataru2,Miyamoto Hiroyuki1

Affiliation:

1. Graduate School of Life Science and Systems Engineering, Kyushu Institute of Technology

2. Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology

Publisher

Japan Institute of Electronics Packaging

Reference11 articles.

1. [1] K. Sreenivasan, S. Mandyam, and K. Alireza, "Automated vision system for inspection of IC pads and bonds," IEEE Transactions on Components, Hybrids, and Manufacturing Technology, Vol. 16, No. 3, pp. 333–338, 1993.

2. [2] O. S. Chan, H. Lo, and C. W. Yuen, "Ultrasonic wire-bond quality monitoring using piezoelectric sensor," Sensors and Actuators A: Physical, Vol. 65, No. 1, pp. 69–75, 1998.

3. [3] S. Ishida, T. Tabaru, M. Akiyama, C. Kubo, and C. Miyazaki, "Detection of Elastic Wave During AL Wire Bonding by Thin Film AE sensor," IEEJ Transactions on Industry Applications, Vol. 134, pp. 323–334, 2009.

4. [4] K. Li, H. Huang, S. Tian, and W. Xu, "Improving one-class SVM for anomaly detection," Proceedings of the 2003 International Conference on Machine Learning and Cybernetics (IEEE Cat. No. 03EX693), Vol. 5, pp. 3077–3081, 2003.

5. [5] V. Vapnik, "Pattern recognition using generalized portrait method," Automation and Remote Control, Vol. 24, pp. 774–780, 1963.

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