Micro gas sensor assembly of tin oxide nano-particles by a capillary micro-molding process
Author:
Affiliation:
1. National Institute for Materials Science
Publisher
Ceramic Society of Japan
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry,Ceramics and Composites
Link
http://www.jstage.jst.go.jp/article/jcersj2/118/1375/118_1375_202/_pdf
Reference20 articles.
1. Powder-Based Tin Oxide Microcomponents on Silicon Substrates Fabricated by Micromolding in Capillaries
2. Soft lithographic methods for nano-fabrication
3. Soft Lithography of Ceramic Patterns
4. Micromolding in Capillaries: Applications in Materials Science
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