Powder-Based Tin Oxide Microcomponents on Silicon Substrates Fabricated by Micromolding in Capillaries
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.2003.tb03313.x/fullpdf
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4. Advanced Sensor Technology Based on Tin Oxide Thin Film-MEMS Integration;Tuller;J. Electroceram.,2000
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