Manufacturing Silicon Carbide Microrotors by Reactive Hot Isostatic Pressing within Micromachined Silicon Molds
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.2002.tb00077.x/fullpdf
Reference9 articles.
1. Surface Micromachining of Polycrystalline SiC Films Using Microfabricated Molds of SiO2 and Polysilicon;Yasseen;IEEE J. Microelectromech. Syst.,1999
2. Silicon Carbide MEMS for Harsh Environments;Mehregany;Proc. IEEE,1998
3. Fabrication of Lead Zirconate Titanate Microrods for 1-3 Piezocomposites Using Hot Isostatic Pressing with Silicon Molds;Wang;J. Am. Ceram. Soc.,1999
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