Special Issue Ceramics Integration. Preparation of Compositionally Graded TiN-AlN and TiN-SiNx Films from Alkoxide Solutions by Liquid Injection Plasma CVD Method.
Author:
Affiliation:
1. Graduate School of Engineering, Hokkaido University
2. National Institute of Advanced Materials Science and Technology
Publisher
Ceramic Society of Japan
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry,Ceramics and Composites
Link
http://www.jstage.jst.go.jp/article/jcersj1988/110/1281/110_1281_444/_pdf
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3. Development of CVD Ti-containing films;Progress in Materials Science;2013-10
4. Synthesis of Ti–Al–Si–N nanocomposite films using liquid injection PECVD from alkoxide precursors;Acta Materialia;2006-05
5. Deposition of TiN films on various substrates from alkoxide solution by plasma-enhanced CVD;Surface and Coatings Technology;2005-09
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