Preparation of PZT Thin Film by Zirconium Oxyacetate-Based Chemical Solution Deposition: Investigation for Structure of Bottom Electrode and Effect of Excessive Pb-Reference-Cited by-同舟云学术

Preparation of PZT Thin Film by Zirconium Oxyacetate-Based Chemical Solution Deposition: Investigation for Structure of Bottom Electrode and Effect of Excessive Pb

Published:2005 Issue:1316 Volume:113 Page:297-302
ISSN:0914-5400
Container-title:Journal of the Ceramic Society of Japan
language:en
Short-container-title:J. Ceram. Soc. Japan

Author:

NAKANO Kenzo¹,SHIMANOE Kengo²,YAMAZOE Noboru²

Affiliation:

1. Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

2. Faculty of Engineering Sciences, Kyushu University

Publisher

Ceramic Society of Japan

Subject

Materials Chemistry,Condensed Matter Physics,General Chemistry,Ceramics and Composites

Link

http://www.jstage.jst.go.jp/article/jcersj/113/1316/113_1316_297/_pdf

Reference28 articles.

1. Single-Target Sputtring Process for Lead Zirconate Titanate Thin Films with Precise Composition Control

2. Dielectric and Electromechanical Properties of Pb(Zr,Ti)O3Thin Films for Piezo-Microelectromechanical System Devices

3. Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: Electrical, optical, and electro‐optic properties

4. Low-Temperature Processing of FerroelectricPb(Zr0.53Ti0.47)O3Thin Film from Molecular-Designed Alkoxide Precursor Solution

5. Low-Temperature Processing of Highly OrientedPb(ZrXTi1-X)O3Thin Film with Multi-Seeding Layers

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