Dielectric and Electromechanical Properties of Pb(Zr,Ti)O3Thin Films for Piezo-Microelectromechanical System Devices-Reference-Cited by-同舟云学术

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Dielectric and Electromechanical Properties of Pb(Zr,Ti)O3Thin Films for Piezo-Microelectromechanical System Devices

Published:2003-09-30 Issue:Part 1, No. 9B Volume:42 Page:5952-5955
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Kim Seung-Hyun,Yang Jeong-Suong,Koo Chang Young,Yeom Jung-Hoon,Yoon Euijoon,Hwang Cheol Seong,Park Joon-Shik,Kang Sung-Goon,Kim Dong-Joo,Ha Jowoong

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/42/i=9S/a=5952/pdf

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4. Piezoelectric MEMS: Ferroelectric thin films for MEMS applications;Japanese Journal of Applied Physics;2018-03-09

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