High Temperature Humidity Sensor Using a Limiting Current Type Plane Oxygen Sensor
Author:
Affiliation:
1. Research & Development Center, NGK Spark Plug Co., Ltd.
Publisher
Ceramic Society of Japan
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry,Ceramics and Composites
Link
http://www.jstage.jst.go.jp/article/jcersj1988/100/1159/100_1159_282/_pdf
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Limiting current-type MEMS oxygen gas sensor integrated with micro-hotplate;2021 IEEE Sensors;2021-10-31
2. Thin film YSZ-based limiting current-type oxygen and humidity sensor on thermally oxidized silicon substrates;Sensors and Actuators B: Chemical;2016-11
3. Rare earth contribution in solid state electrolytes, especially in the chemical sensor field;Journal of Alloys and Compounds;1997-03
4. High-temperature humidity sensor using a limiting-current-type plane multi-oxygen sensor for direct firing system;Sensors and Actuators B: Chemical;1995-04
5. Ceramic sensors for humidity detection: the state-of-the-art and future developments;Sensors and Actuators B: Chemical;1995-02
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