Experimental investigation of the governing parameters of the electrostatic field–induced electrolyte jet micro electrical discharge machining on the silicon wafer

Abstract

Electrostatic field–induced electrolyte jet micro electrical discharge machining relies on the cyclic and pulsating electrical discharge between the tip of the fine jet, and the workpiece to remove the debris. To further explore the processing characteristics, the single-pulsating discharge experiments have been carried out with the NaCl electrolyte as the jet solution and the silicon wafer as the workpiece. The experimental results have shown that the crater size after a single electrostatic field–induced electrolyte jet discharge increases with an increase in the voltage applied between the nozzle and the workpiece and increases with an increase in the electrolyte concentration, but declines with an increase in the nozzle-to-workpiece distance. Moreover, the crater size has no direct relationship with the machining polarity, but slightly declines with an increase in the inner diameter of the nozzle. Finally, the conclusion that the parameters which influence the charge density on the electrolyte jet surface can determine the diameter of the single-discharge crater has also been drawn.