Mechanism of the scratching of monocrystalline silicon carbide with a diamond grit at different wear stages

Abstract

An investigation was conducted to explore the mechanisms of the scratching of monocrystalline silicon carbide with a single diamond grit. The scratching was repeated on a silicon carbide workpiece to generate different wear shapes of the diamond grit. The forces were recorded during each scratching and the wear of the diamond grit together with the silicon carbide morphologies was monitored at a fixed interval. Based on the different diamond wear shapes determined through scratching experiments, a smoothed particle hydrodynamics method was used to simulate the scratching process. In addition to the items monitored in the experiments, the simulation was also used to analyze the change of subsurface damages on silicon carbide and to predict the mechanisms of diamond damage. It is shown that double-edged abrasive grits might lead to a better silicon carbide surface quality in scratching. The simulation results indicate that the maximum equivalent stress distribution might be used to predict the damage of the diamond grits during scratching. The findings of this article will be of benefit to the optimal selection of machining parameters and the optimal design of diamond tools for abrasive machining of monocrystalline silicon carbide.