Passive wireless pressure sensor fabricated in low-temperature co-fired ceramic technology-Reference-Cited by-同舟云学术

Passive wireless pressure sensor fabricated in low-temperature co-fired ceramic technology

Published:2014-04-16 Issue:4 Volume:229 Page:160-165
ISSN:1740-3499
Container-title:Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems
language:en
Short-container-title:Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems

Author:

Yang Mingliang¹²,Liu Wei¹²,Xiong Jijun¹²,Li Chao¹²,Luo Tao²,Tan Qiulin¹²

Affiliation:

1. Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education, Taiyuan, 030051, China

2. National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan, China

Abstract

A passive wireless pressure sensor based on low-temperature co-fired ceramic was investigated. The sensor is equivalent to a LC resonant circuit, which has a planar spiral inductor and an interdigital capacitor electrically connected. The inductor and capacitor are fabricated by screen printing technology. The working principle of the sensor is based on the pressure-sensitive resonant frequency of the LC circuit. Wireless detection can be realized by electromagnetic coupling with two inductor coils. The results show that the resonant frequency of sensor decreases with the increase in pressure, and sensitivity of the sensor is about 412.32 kHz/bar.

Publisher

SAGE Publications

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science

Link

http://journals.sagepub.com/doi/pdf/10.1177/1740349914530697

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