Numerical Investigation of Particle Diffusion in a Clean Room
Author:
Affiliation:
1. Department of Building Science, School of Architecture, Tsinghua University, Beijing, 100084, China
Abstract
Publisher
SAGE Publications
Subject
Public Health, Environmental and Occupational Health
Link
http://journals.sagepub.com/doi/pdf/10.1177/1420326X05060190
Reference17 articles.
1. Design and evaluation of a minienvironment for semiconductor manufacture processes
2. Use of Computational Fluid Dynamics Applications in Cleanroom Design
3. Computer-Aided Design of a Cleanroom Ceiling Plenum System with a Limited Space for HVAC Equipment
4. Comparison of Indoor Environment of a Locally Concentrated Cleanroom at Occupied and Unoccupied Status by Numerical Method
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